Stage for plasma processing apparatus, and plasma processing apparatus

• US 20080073032A1
• Filed: 08/10/2007
• Published: 03/27/2008
• Est. Priority Date: 08/10/2006
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Himori, Shinji, Matsuyama, Shoichiro, Koshiishi, Akira
• Application Number:
  US11/889,338
• Publication Number:
  US 20080073032A1
• Time in Patent Office: Days
• US Class Current: 156/345.51
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/32706 Polarising the substrate

Abstract

[Object] To provide a stage for plasma processing apparatus, the stage being capable of improving uniformity of electric field strength in a plasma so as to enhance an in-plane uniformity of a plasma process to a substrate, and to provide a plasma processing apparatus provided with this stage.

[Means for Solving the Problem] A stage 1 for a plasma processing apparatus 2 comprises: a conductive member 21 serving as an electrode for generating a plasma or the like; a dielectric layer 22 covering a center part of an upper surface of the conductive member, for making uniform a radiofrequency electric field applied to a plasma through a substrate to be processed (wafer W); and an electrostatic chuck laminated on the dielectric layer 22, the electric chuck having a plurality of electrode films embedded therein, the electrode films being separated apart from each other in a radial direction of the stage to allow passage of a radiofrequency. An outer edge of the dielectric layer 22 is positioned right below or outside an inner edge of at least one separation area 23c of the separated electrode films 23b and 23d. The separated electrode films 23b and 23d are insulated to each other as to a radiofrequency.

Claims

1. A stage for a plasma processing apparatus, the stage being configured to place on a placing surface thereof a substrate to be processed, the stage comprising:

a conductive member connected to a radiofrequency power source, the conductive member serving as an electrode for generating a plasma and/or as an electrode for drawing ions from a plasma;

a dielectric layer covering a center part of an upper surface of the conductive member, for making uniform a radiofrequency electric field applied to a plasma through a substrate to be processed placed on the placing surface; and

an electrostatic chuck laminated on the dielectric layer, the electric chuck having a plurality of electrode films embedded therein, the electrode films being separated apart from each other in a radial direction of the stage to allow passage of a radiofrequency;

wherein an outer edge of the dielectric layer is positioned right below or outside an inner edge of at least one separation area of the separated electrode films, and

the separated electrode films are insulated to each other as to a radiofrequency.

2. The stage for a plasma processing apparatus according to claim 1, wherein

a plurality of dielectric layers are laminated as the dielectric layer,

a lower dielectric layer of the plurality of dielectric layers is located such that an outer edge of the lower dielectric layer is positioned inside relative to that of an upper dielectric layer, and

the number of the separated electrode films is larger than the number of the laminated dielectric layers at least by one.

4. The stage for a plasma processing apparatus according to one of claims 1 to 3,

wherein the dielectric layer is formed into a columnar shape.

5. The stage for a plasma processing apparatus according to one of claims 1 to 3,

wherein a thickness of a circumferential part of the dielectric layer is smaller than a thickness of a center part of the dielectric layer.

6. The stage for a plasma processing apparatus according to one of claims 1 to 5,

wherein a frequency of the radiofrequency supplied from the radiofrequency power source is not less than 13 MHz.

7. A plasma processing apparatus comprising:

a process vessel configured to subject a substrate to be processed to a plasma process;

a process-gas introducing part for introducing a process gas into the process vessel;

the stage for a plasma processing apparatus according to one of claims 1 to 6, the stage being disposed in the process vessel;

an upper electrode disposed in the process vessel, the upper electrode being positioned above the stage and opposed thereto; and

a unit for evacuating an inside of the process vessel to create therein a vacuum.

3. A stage for plasma processing apparatus, the stage being configured to place on a placing surface thereof a substrate to be processed, the stage comprising:

a conductive member connected to a radiofrequency power source, the conductive member serving as an electrode for generating a plasma and/or as an electrode for drawing ions from a plasma;

a dielectric layer covering a center part of an upper surface of the conductive member, for making uniform a radiofrequency electric field applied to a plasma through a substrate to be processed placed on the placing surface; and

an electrostatic chuck laminated on the dielectric layer, the electric chuck having a hole formed in a position corresponding to a center part of the stage to allow passage of a radiofrequency;

wherein the dielectric layer is positioned below the hole.