Optical element, liquid immersion exposure apparatus, liquid immersion exposure method, and method for producing microdevice
First Claim
Patent Images
1. An optical element used such that at least one surface thereof is in contact with a liquid in a liquid immersion exposure apparatus in which a substrate is exposed by exposure light illuminated on the substrate via the liquid with a refraction index in a range between 1.60 and 1.66 to the light with a wavelength of 193 nm, comprising:
- a base material with a refraction index in a range between 2.10 and 2.30 to the light with a wavelength of 193 nm; and
a first antireflection film formed on the contact surface between the base material and the liquid,wherein the first antireflection film includes a first antireflection layer with a refraction index in a range between 1.80 and 2.02 to the light with a wavelength of 193 nm and an optical film thickness in a range between 0.25λ and
0.42λ
to the wavelength λ
of the exposure light,a second antireflection layer with a refraction index in a range between 1.65 and 1.77 to the light with a wavelength of 193 nm and an optical film thickness in a range between 0.10λ and
0.45λ
to the wavelength λ
of the exposure light, andthe first antireflection layer and the second antireflection layer are sequentially laminated in an order from the base material side.
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Accused Products
Abstract
An optical element used such that at least one surface thereof is in contact with a liquid in a liquid immersion exposure apparatus in which a substrate is exposed by exposure light illuminated on the substrate via the liquid with a refraction index in a range between 1.60 and 1.66 to the light with a wavelength of 193 nm, comprising:
- a base material with a refraction index in a range between 2.10 and 2.30 to the light with a wavelength of 193 nm; and
- a first antireflection film formed on the contact surface between the base material and the liquid,
- wherein the first antireflection film includes a first antireflection layer with a refraction index in a range between 1.80 and 2.02 to the light with a wavelength of 193 nm and an optical film thickness in a range between 0.25λ and 0.42λ to the wavelength λ of the exposure light,
- a second antireflection layer with a refraction index in a range between 1.65 and 1.77 to the light with a wavelength of 193 nm and an optical film thickness in a range between 0.10λ and 0.45λ to the wavelength λ of the exposure light, and
- the first antireflection layer and the second antireflection layer are sequentially laminated in an order from the base material side.
22 Citations
14 Claims
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1. An optical element used such that at least one surface thereof is in contact with a liquid in a liquid immersion exposure apparatus in which a substrate is exposed by exposure light illuminated on the substrate via the liquid with a refraction index in a range between 1.60 and 1.66 to the light with a wavelength of 193 nm, comprising:
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a base material with a refraction index in a range between 2.10 and 2.30 to the light with a wavelength of 193 nm; and a first antireflection film formed on the contact surface between the base material and the liquid, wherein the first antireflection film includes a first antireflection layer with a refraction index in a range between 1.80 and 2.02 to the light with a wavelength of 193 nm and an optical film thickness in a range between 0.25λ and
0.42λ
to the wavelength λ
of the exposure light,a second antireflection layer with a refraction index in a range between 1.65 and 1.77 to the light with a wavelength of 193 nm and an optical film thickness in a range between 0.10λ and
0.45λ
to the wavelength λ
of the exposure light, andthe first antireflection layer and the second antireflection layer are sequentially laminated in an order from the base material side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification