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Method for Producing Internal Antenna with Anti-Electromagnetic Interference Property Through Vacuum Process

  • US 20090101494A1
  • Filed: 07/21/2008
  • Published: 04/23/2009
  • Est. Priority Date: 10/19/2007
  • Status: Abandoned Application
First Claim
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1. A method for producing an internal antenna with anti-electromagnetic interference property by performing a vacuum process, comprising:

  • (a) performing a surface pretreatment process on an insulating substrate to clean the surface of the insulating substrate;

    (b) performing a vacuum process, comprising;

    (b-1) sputtering a conductive layer on the insulating substrate, wherein the insulating substrate is placed into a vacuum chamber and a first plasma bombardment is performed by using a conductive target material, such that surface components of the conductive target material are sputtered in a form of atoms for being deposited and covered on the whole insulating substrate;

    (b-2) sputtering a passivation layer on the conductive layer, wherein the insulating substrate is placed into another vacuum chamber, and a second plasma bombardment is performed by using a passivation target material, such that surface components of the passivation target material are sputtered in as a form of atoms for being deposited and covered on the conductive layer; and

    (c) removing a certain part of the passivation layer and the conductive layer, so that a planar antenna pattern is remained with a certain distance spaced apart from the surrounding passivation layer and conductive layer.

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