INTEGRATED THREE-DIMENSIONAL MAGNETIC SENSING DEVICE AND METHOD TO FABRICATE AN INTEGRATED THREE-DIMENSIONAL MAGNETIC SENSING DEVICE
First Claim
1. A three-axis magnetic sensing device comprising:
- first and second sensing components configured to sense magnetic fields along two orthogonal axes planar to a surface of a substrate; and
a third sensing component configured to sense a magnetic field along an axis out of plane of the surface of the substrate,wherein the third sensing component includes a carbon-based material.
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Abstract
A three-axis magnetic sensing device included on a single chip. An example three-axis magnetic sensing device includes first and second sensing components that sense magnetic fields along two orthogonal axes planar to a surface of a substrate and a third sensing component that senses a magnetic field along an axis out of plane of the surface of the substrate. The third sensing component includes a carbon-based material. In one example, the first and second sensing components are anisotropic magnetoresistive sensors. In another example, the carbon-based material includes carbon nanotubes and the third sensing component includes a needle attached to the carbon-based material and electrodes that make contact with the carbon-based material.
42 Citations
18 Claims
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1. A three-axis magnetic sensing device comprising:
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first and second sensing components configured to sense magnetic fields along two orthogonal axes planar to a surface of a substrate; and a third sensing component configured to sense a magnetic field along an axis out of plane of the surface of the substrate, wherein the third sensing component includes a carbon-based material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of making a three-axis magnetic sensing device, the method comprising:
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forming first and second sensing components on a surface of a substrate, the first and second sensing components configured to sense magnetic fields along two orthogonal axes planar to the surface of the substrate; and forming a third sensing component on the substrate, the third sensing component configured to sense a magnetic field along an axis out of plane of the surface of the substrate, wherein the third sensing component includes a carbon-based material. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification