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ON-THE-FLY DIMENSIONAL IMAGING INSPECTION

  • US 20110267451A1
  • Filed: 05/03/2010
  • Published: 11/03/2011
  • Est. Priority Date: 05/03/2010
  • Status: Active Grant
First Claim
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1. A method for inspecting a plurality of target features arrayed in spaced arrangement on a surface of a target object, comprising the steps of:

  • providing a fixture for holding the target object;

    providing a high speed camera;

    selectively positioning at least one of the holding fixture and the high speed camera relative to the other in a continuous relative motion along a three-dimensional path over a plurality of selected target features without pause; and

    each time the high speed camera orientates to a selected target feature, capturing an image of the selected target feature during an exposure duration using the high speed camera while in relative motion.

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