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On-the-fly dimensional imaging inspection

  • US 8,797,398 B2
  • Filed: 05/03/2010
  • Issued: 08/05/2014
  • Est. Priority Date: 05/03/2010
  • Status: Active Grant
First Claim
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1. A method for inspecting a plurality of target features arrayed in spaced arrangement on a surface of a target object, comprising the steps of:

  • providing a fixture for holding the target object;

    providing a high speed camera;

    selectively positioning at least one of the holding fixture and the high speed camera relative to the other in a continuous relative motion along a three-dimensional path over a plurality of selected target features without pause; and

    each time the high speed camera orientates to a selected target feature, capturing an image and determining a location of the selected target feature during an exposure duration using the high speed camera while in relative motion, the high speed camera enabling inspecting of the plurality of selected target features without pause, movement of the selected target feature relative to the high speed camera over a duration of a frame capture being less than a predetermined fraction of a true position tolerance of the selected target feature.

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