OPTOELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. An optoelectronic device, comprising:
- a substrate having a surface and a normal direction perpendicular to the surface;
a first semiconductor layer formed on the surface of the substrate; and
at least one hollow component formed between the first semiconductor layer and the surface of the substrate wherein a height of the hollow component varies along with a first direction perpendicular to the normal direction and/or a width of the hollow component varies along with a second direction parallel with the normal direction.
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Accused Products
Abstract
An optoelectronic device is provided that includes a substrate having a surface and a normal direction perpendicular to the surface, a first semiconductor layer formed on the surface, and at least one hollow component formed between the first semiconductor layer and the surface. A method of fabricating an optoelectronic device is also provided that includes providing a substrate having a surface and a normal direction perpendicular to the surface, forming a first semiconductor layer on the surface, patterning the first semiconductor layer, forming a second semiconductor layer on the substrate and cover the patterned first semiconductor layer, and forming at least one hollow component formed between the first semiconductor layer and the surface. A height of the hollow component varies along with a first direction perpendicular to the normal direction and/or a width of the hollow component varies along with a second direction parallel with the normal direction.
17 Citations
20 Claims
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1. An optoelectronic device, comprising:
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a substrate having a surface and a normal direction perpendicular to the surface; a first semiconductor layer formed on the surface of the substrate; and at least one hollow component formed between the first semiconductor layer and the surface of the substrate wherein a height of the hollow component varies along with a first direction perpendicular to the normal direction and/or a width of the hollow component varies along with a second direction parallel with the normal direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of fabricating an optoelectronic device, comprising:
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providing a substrate having a surface and a normal direction perpendicular to the surface; forming a first semiconductor layer on the surface of the substrate; patterning the first semiconductor layer; forming a second semiconductor layer on the substrate and cover the patterned first semiconductor layer; and forming at least one hollow component formed between the first semiconductor layer and the surface of the substrate wherein a height of the hollow component varies along with a first direction perpendicular to the normal direction and/or a width of the hollow component varies along with a second direction parallel with the normal direction. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification