IN-SITU MASK ALIGNMENT FOR DEPOSITION TOOLS

• US 20120237682A1
• Filed: 03/07/2012
• Published: 09/20/2012
• Est. Priority Date: 03/18/2011
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Hong, Ilyoung Richard, Sterling, William N., Lee, Dongsuh
• Application Number:
  US13/414,434
• Publication Number:
  US 20120237682A1
• Time in Patent Office: Days
• US Class Current: 427/282
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: Y10T 29/49778 with aligning, guiding, or instruction

Abstract

A system for handling masked substrates comprising a chamber having a pedestal for supporting a substrate, and a chuck for supporting a mask in relation to a substrate. The system may include an alignment system operable to confirm alignment of the mask and the substrate. A method of positioning a mask on a substrate in a chamber comprises supporting the mask with a chuck disposed in the chamber and supporting the substrate with a pedestal disposed in the chamber. The method may further comprise aligning one or more reference points on the mask with one or more reference points on the substrate and positioning the mask on the substrate using at least one of the chuck and the pedestal.

Claims

1. A system for handling masked substrates, comprising:

a chamber having a pedestal for supporting a substrate, and a chuck for supporting a mask in relation to a substrate; and

an alignment system operable to confirm alignment of the mask and the substrate.

2. The system of claim 1, wherein the alignment system is operable to detect one or more reference points on the substrate and on the mask, and calculate a position of the reference points relative to a fixed coordinate system to assist in alignment of the mask and the substrate to one another.

3. The system of claim 2, wherein the alignment system is operable to communicate directional coordinates to at least one of the pedestal and the chuck, and wherein the at least one pedestal and chuck are operable to move the substrate, the mask, or both to align the reference points.

4. The system of claim 3, wherein the alignment system includes at least three cameras for detecting at least three reference points on the substrate and the mask.

5. The system of claim 1, wherein the chuck is an electromagnetic chuck having one or more electromagnets configured to move the mask with respect to a plane of the substrate, and wherein the surfaces of the electromagnets are coated with a soft material and the soft material selectively contacts the mask.

6. The system of claim 1, wherein the chuck is a vacuum chuck having one or more vacuum cups configured move the mask with respect to a plane of the substrate, and wherein the surfaces of the vacuum cups are coated with a soft material and the soft material selectively contacts the mask.

7. The system of claim 1, wherein the chamber comprises a body, an upper chamber, and a lower chamber, wherein the chuck and the pedestal are disposed in the upper chamber, and wherein the lower chamber comprises one or more support members for storing masks that are supported on carriers.

8. A method of positioning a mask on a substrate in a chamber, comprising:

supporting the mask with a chuck disposed in the chamber;

supporting the substrate with a pedestal disposed in the chamber;

aligning one or more reference points on the mask with one or more reference points on the substrate; and

positioning the mask on the substrate using at least one of the chuck and the pedestal.

9. The method of claim 8, wherein the chuck is one of an electromagnetic chuck and a vacuum chuck, each having one or more engagement members operable to engage and support the mask, and wherein the surfaces of the engagement members that contact the mask are coated with a soft material.

10. The method of claim 9, wherein the engagement members comprise at least one of electromagnets, electromagnetic strips, vacuum cups, and suction holes.

11. The method of claim 10, further comprising positioning the mask on the substrate using the engagement members by placing a center portion of the mask into contact with the substrate prior to an outer portion of the mask.

12. The method of claim 11, wherein the one of the electromagnetic chuck and the vacuum chuck includes a non-planar surface relative to a surface of the substrate that the mask is positioned on.

13. The method of claim 11, further comprising releasing the center portion of the mask from one or more of the engagement members prior to releasing the outer portion.

14. The method of claim 8, further comprising detecting the one or more reference points on the mask and the substrate using one or more cameras, calculating a position of the one or more reference points on the mask and the substrate relative to a fixed coordinate system to assist in aligning the mask and the substrate, and moving at least one of the mask with the chuck and the substrate with the pedestal to align the one or more reference points on the mask and the substrate.

15. The method of claim 8, further comprising performing a deposition process on the substrate after positioning the mask on the substrate, and removing the mask from the substrate after performing the deposition process.

16. The method of claim 15, further comprising moving the mask into the chamber on a carrier and then lifting the mask from the carrier using the chuck.

17. The method of claim 15, further comprising positioning the mask on a carrier and moving the mask and the carrier to another chamber, and further comprising cleaning the mask and the carrier.

18. A method of handling a mask and a substrate, comprising:

positioning the mask on the substrate in a first chamber;

processing the substrate while the mask is positioned on the substrate in a second chamber;

removing the mask from the substrate after processing the substrate in a third chamber;

positioning the mask on a carrier in the third chamber; and

cleaning the mask on the carrier in a fourth chamber.

19. The method of claim 18, wherein the first chamber and the fourth chamber are formed from a chamber body, such that the first chamber is an upper chamber of the chamber body and the fourth chamber is a lower chamber of the chamber body.

20. The method of claim 18, wherein the third chamber and the fourth chamber are formed from a chamber body, such that the third chamber is an upper chamber of the chamber body and the fourth chamber is a lower chamber of the chamber body.