MEMS DEVICE HAVING CHIP SCALE PACKAGING
First Claim
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1. A device, comprising:
- a first substrate having a MEMS device disposed on a frontside of the first substrate;
a second substrate including an integrated circuit (IC) and having a frontside and an opposing backside, wherein a first bonding feature on the frontside of the first substrate is bonded to a second bonding feature on a backside of the second substrate.
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Abstract
A method and device having chip scale MEMS packaging is described. A first substrate includes a MEMS device and a second substrate includes an integrated circuit. The frontside of the first substrate is bonded to the backside of the second substrate. Thus, the second substrate provides a cavity to encase, protect or operate the MEMS device within. The bond may provide an electrical connection between the first and second substrate. In an embodiment, a through silicon via is used to carry the signals from the first substrate to an I/O connection on the frontside of the second substrate.
21 Citations
20 Claims
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1. A device, comprising:
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a first substrate having a MEMS device disposed on a frontside of the first substrate; a second substrate including an integrated circuit (IC) and having a frontside and an opposing backside, wherein a first bonding feature on the frontside of the first substrate is bonded to a second bonding feature on a backside of the second substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method, comprising:
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providing a first substrate having a MEMS device disposed on a frontside of the first substrate; providing a second substrate including an integrated circuit and having a backside and an opposing frontside; forming a first bonding feature on the frontside of the first substrate; forming a second bonding feature on the backside of second substrate; and providing an electrical connection between the first substrate and the second substrate by connecting the first bonding feature and the second bonding feature. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method, comprising:
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providing a first substrate having a MEMS device disposed on a frontside of the first substrate; providing a second substrate including features of a circuit; etching a recess in a backside of the second substrate; and bonding the frontside of the first substrate and the backside of the second substrate such that the MEMS device is disposed a cavity defined by the recess. - View Dependent Claims (18, 19, 20)
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Specification