Apparatus For Spatial Atomic Layer Deposition With Recirculation And Methods Of Use
First Claim
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1. A deposition system, comprising:
- a processing chamber; and
a gas distribution apparatus in the processing chamber, the gas distribution apparatus comprising a plurality of elongate gas ports including at least one first reactive gas port in fluid communication with a first reactive gas, at least one second reactive gas port in fluid communication with a second reactive gas different from the first reactive gas, and pump ports surrounding each of the first reactive gas port and second reactive gas port, the pump ports including a first group of pump ports in fluid communication with a first conduit and a second group of pump ports in fluid communication with a second conduit that prevents mixing of the gases flowing through the first group of pump ports and second group of pump ports, wherein one or more of the first conduit and second conduit is in fluid communication with one or more of a condenser to condense the gas flowing through the conduit and a storage container to store the gas flowing through the conduit.
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Abstract
Provided are atomic layer deposition apparatus and methods including a plurality of elongate gas ports and pump ports in communication with multiple conduits to transport the gases from the processing chamber to be condensed, stored and/or recirculated.
28 Citations
20 Claims
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1. A deposition system, comprising:
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a processing chamber; and a gas distribution apparatus in the processing chamber, the gas distribution apparatus comprising a plurality of elongate gas ports including at least one first reactive gas port in fluid communication with a first reactive gas, at least one second reactive gas port in fluid communication with a second reactive gas different from the first reactive gas, and pump ports surrounding each of the first reactive gas port and second reactive gas port, the pump ports including a first group of pump ports in fluid communication with a first conduit and a second group of pump ports in fluid communication with a second conduit that prevents mixing of the gases flowing through the first group of pump ports and second group of pump ports, wherein one or more of the first conduit and second conduit is in fluid communication with one or more of a condenser to condense the gas flowing through the conduit and a storage container to store the gas flowing through the conduit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A deposition system, comprising:
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a processing chamber; and a gas distribution apparatus in the processing chamber, the gas distribution apparatus comprising a plurality of elongate gas ports including, in order, a first reactive gas port in fluid communication with a first reactive gas, a purge gas port in fluid communication with a purge gas, a second reactive gas port in fluid communication with a second reactive gas different from the first reactive gas, and pump ports surrounding each of the first reactive gas port, the purge gas port and the second reactive gas port, the pump ports including a first group of pump ports in fluid communication with a first conduit and a second group of pump ports in fluid communication with a second conduit that prevents mixing of the gases flowing through the first group of pump ports and second group of pump ports, wherein the pump ports adjacent one of the first reactive gas port and the second reactive gas port are in fluid communication with the first conduit and the pump ports adjacent the other of the first reactive gas port and the second reactive gas port are in fluid communication with the second conduit, wherein one of the first conduit and second conduit is in fluid communication with one or more of a condenser to condense the gas flowing through the conduit and a storage container to store the gas flowing through the conduit. - View Dependent Claims (16, 17)
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18. A processing method comprising:
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flowing simultaneous alternating streams of a first reactive gas from a first reactive gas port and a stream of a second reactive gas from a second reactive gas port over a surface; and collecting first reactive gas from the surface in a first group of pump ports surrounding the first reactive gas port; collecting second reactive gas from the surface in a second group of pump ports surrounding the second reactive gas port; directing the gas in the first group of pump ports through a first conduit; and directing the gas in the second group of pump ports through a second conduit separate from the first conduit, wherein at least one of the first conduit and the second conduit is in fluid communication with a condenser or a storage container. - View Dependent Claims (19, 20)
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Specification