MAGNETORESISTIVE RANDOM ACCESS MEMORY
First Claim
1. A method of forming a magnetic random access memory (MRAM) device, comprising:
- forming at least one write line;
forming a first insulating layer over the at least one write line;
forming a heating line on the first insulating layer;
forming at least one tunnel junction above the at least one write line, the at least one tunnel junction connected to the heating line;
forming a second insulating layer on the heating line;
forming heat current supply vias at each end of the current line;
forming heat current supply lines connected to each heat current supply via; and
forming at least one read line above the at least one tunnel junction and physically connected to the at least one tunnel junction.
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Abstract
A method of forming a magnetic random access memory (MRAM) device includes forming at least one write line, forming a first insulating layer over the at least one write line and forming a heating line on the first insulating layer. The method includes forming at least one tunnel junction above the at least one write line, the at least one tunnel junction connected to the heating line, forming a second insulating layer on the heating line and forming heat current supply vias at each end of the current line. The method further includes forming heat current supply lines connected to each heat current supply via and forming at least one read line above the at least one tunnel junction and physically connected to the at least one tunnel junction.
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Citations
10 Claims
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1. A method of forming a magnetic random access memory (MRAM) device, comprising:
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forming at least one write line; forming a first insulating layer over the at least one write line; forming a heating line on the first insulating layer; forming at least one tunnel junction above the at least one write line, the at least one tunnel junction connected to the heating line; forming a second insulating layer on the heating line; forming heat current supply vias at each end of the current line; forming heat current supply lines connected to each heat current supply via; and forming at least one read line above the at least one tunnel junction and physically connected to the at least one tunnel junction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification