HIGH VOLTAGE NANOSECOND PULSER
First Claim
1. A nanosecond pulser comprising:
- a plurality of switch modules, each of the plurality of switch modules include one or more solid state switches;
a transformer comprising;
at least one core;
a primary winding wound at least partially around a portion of the core, each of the plurality of switch modules are coupled with the primary windings; and
a plurality of secondary windings wound at least partially around a portion of the core; and
an output that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds.
2 Assignments
0 Petitions
Accused Products
Abstract
A nanosecond pulser may include a plurality of switch modules, a transformer, and an output. Each of the plurality of switch modules may include one or more solid state switches. The transformer may include a core, at least one primary winding wound around at least a portion of the core, each of the plurality of switch modules may be coupled with the primary windings, and a plurality of secondary windings wound at least partially around a portion of the core. The output may output electrical pulses having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds. The output may output electrical pulses having a peak voltage greater than about 5 kilovolts, a peak power greater than about 100 kilowatts, a pulse width between 10 nanoseconds and 1000 nanoseconds, a rise time less than about 50 nanoseconds, or some combination thereof.
76 Citations
20 Claims
-
1. A nanosecond pulser comprising:
-
a plurality of switch modules, each of the plurality of switch modules include one or more solid state switches; a transformer comprising; at least one core; a primary winding wound at least partially around a portion of the core, each of the plurality of switch modules are coupled with the primary windings; and a plurality of secondary windings wound at least partially around a portion of the core; and an output that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A nanosecond pulser comprising:
-
a circuit board; a transformer having a transformer core disposed on the circuit board, a plurality of primary windings wound around at least a portion of the core, and a plurality of secondary windings wound around the core; and a plurality of solid state switches disposed radially around the transformer on the circuit board, each of the plurality of solid state switches are coupled with at least one primary winding.
-
- 16. The nanosecond pulser according to claim 16, further comprising a plurality of capacitors disposed on the circuit board, wherein each of the plurality of capacitors are disposed on the circuit board between the core and at least one of the plurality of solid state switches.
-
19. A nanosecond pulser comprising:
-
a plurality of solid state switches; an input electronically coupled with the plurality of solid state switches; an input pulse signal electronically coupled with the plurality of solid state switches having an input pulse width between 1 ns and 1000 ns and an input pulse repetition frequency greater than 10 kHz; and an output electrically coupled with the plurality of solid state switches, the output voltage comprising; an output pulse peak voltage proportional to the input voltage and greater than about 1 kilovolt, an output pulse width proportional to the input pulse width, and an output repetition frequency proportional to the input pulse repetition frequency; wherein a change to one of the input voltage, the input pulse width, and the input pulse repetition frequency may result in a change to only a corresponding one of the output pulse peak voltage, the output pulse width, and the output repetition frequency.
-
-
20. The nanosecond pulser according to claim 20, further comprising a transformer having a core, a plurality of primary windings, and a plurality of secondary windings, wherein the plurality of solid state switches are electrically coupled with the primary windings and the and the output is electrically coupled with the output.
Specification