High voltage nanosecond pulser
First Claim
1. A nanosecond pulser comprising:
- a plurality of switch modules, each of the plurality of switch modules include one or more solid state switches, wherein a duration of opening and closing of the solid state switches is directly proportional to a pulse width of an input pulse;
a transformer electrically coupled with the plurality of switches comprising;
at least one core;
a primary winding that includes a plurality of single windings that are each wound at least partially around a portion of the at least one core, each of the plurality of switch modules are electrically coupled with one of the plurality of single windings; and
a plurality of secondary windings wound at least partially around a portion of the core; and
an output coupled with the plurality of secondary windings, the output providing an output pulse having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds, and wherein a pulse width of the output pulse has a duration that is proportional to a duration of a pulse width of the input pulse.
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Accused Products
Abstract
A nanosecond pulser may include a plurality of switch modules, a transformer, and an output. Each of the plurality of switch modules may include one or more solid state switches. The transformer may include a core, at least one primary winding wound around at least a portion of the core, each of the plurality of switch modules may be coupled with the primary windings, and a plurality of secondary windings wound at least partially around a portion of the core. The output may output electrical pulses having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds. The output may output electrical pulses having a peak voltage greater than about 5 kilovolts, a peak power greater than about 100 kilowatts, a pulse width between 10 nanoseconds and 1000 nanoseconds, a rise time less than about 50 nanoseconds, or some combination thereof.
74 Citations
20 Claims
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1. A nanosecond pulser comprising:
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a plurality of switch modules, each of the plurality of switch modules include one or more solid state switches, wherein a duration of opening and closing of the solid state switches is directly proportional to a pulse width of an input pulse; a transformer electrically coupled with the plurality of switches comprising; at least one core; a primary winding that includes a plurality of single windings that are each wound at least partially around a portion of the at least one core, each of the plurality of switch modules are electrically coupled with one of the plurality of single windings; and a plurality of secondary windings wound at least partially around a portion of the core; and an output coupled with the plurality of secondary windings, the output providing an output pulse having a peak voltage greater than about 1 kilovolt and having a pulse width of less than about 1000 nanoseconds, and wherein a pulse width of the output pulse has a duration that is proportional to a duration of a pulse width of the input pulse. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A nanosecond pulser comprising:
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a circuit board; a transformer having a transformer core disposed on the circuit board, a plurality of primary windings, such that each of the primary windings include a plurality of single windings that are each wound around at least a portion of the core, and a plurality of secondary windings wound around the core; and a plurality of solid state switches disposed radially around the transformer on the circuit board, each of the plurality of solid state switches are coupled with at least one of the plurality of single windings of the transformer, wherein a duration of opening and closing of the plurality of solid state switches is directly proportional to a pulse width of an input pulse, and wherein an output pulse width from an output coupled with the plurality of secondary windings is directly proportional to the pulse width of the input pulse. - View Dependent Claims (15, 16, 17, 18)
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19. A nanosecond pulser comprising:
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a plurality of solid state switches; an input electronically coupled with the plurality of solid state switches, wherein the input provides an input pulse signal to the plurality of solid state switches having an input pulse width between 1 ns and 1000 ns and an input pulse repetition frequency greater than 10 kHz, wherein a duration of opening and closing of the plurality of solid state switches is directly proportional to the input pulse width of the input pulse signal; a transformer having a primary side and a secondary side, the primary side is electronically coupled with the plurality of solid state switches; and an output electrically coupled with the second side of the transformer, the output configured to produce an output voltage comprising; an output pulse peak voltage proportional to the input voltage and greater than about 1 kilovolt, a pulse width of the output pulse that is directly proportional to a pulse width of the input pulse, and a pulse repetition frequency of the output pulse that is proportional to a pulse repetition frequency of the input pulse; wherein, in the event of a change to one of the input voltage, the input pulse width, and the input pulse repetition frequency there is a change to only a corresponding one of the output pulse peak voltage, the output pulse width, and the output repetition frequency. - View Dependent Claims (20)
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Specification