COLLOIDAL SILICA CHEMICAL-MECHANICAL POLISHING COMPOSITION
First Claim
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1. A chemical mechanical polishing composition comprising:
- a water based liquid carrier;
colloidal silica abrasive particles dispersed in the liquid carrier;
a chemical species incorporated in the colloidal silica abrasive particles internal to an outer surface thereof, wherein the chemical species is a nitrogen containing compound or a phosphorus containing compound;
a pH in a range from about 3.5 to about 6;
wherein the colloidal silica abrasive particles have a permanent positive charge of at least 15 mV; and
wherein the chemical species is not an aminosilane or a phosphonium silane.
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Abstract
A chemical-mechanical polishing composition includes colloidal silica abrasive particles dispersed in a liquid carrier. The colloidal silica abrasive particles include a nitrogen-containing or phosphorus-containing compound incorporated therein such that the particles have a positive charge. The composition may be used to polish a substrate including a silicon oxygen material such as TEOS.
7 Citations
46 Claims
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1. A chemical mechanical polishing composition comprising:
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a water based liquid carrier; colloidal silica abrasive particles dispersed in the liquid carrier; a chemical species incorporated in the colloidal silica abrasive particles internal to an outer surface thereof, wherein the chemical species is a nitrogen containing compound or a phosphorus containing compound; a pH in a range from about 3.5 to about 6; wherein the colloidal silica abrasive particles have a permanent positive charge of at least 15 mV; and wherein the chemical species is not an aminosilane or a phosphonium silane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 26, 39, 40, 41, 42, 43, 44, 45, 46)
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27. A chemical mechanical polishing composition comprising:
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a water based liquid carrier; colloidal silica abrasive particles dispersed in the liquid carrier; a chemical species incorporated in the colloidal silica abrasive particles internal to an outer surface thereof, wherein the chemical species is a nitrogen containing compound or a phosphorus containing compound; a pH in a range from about 1.5 to about 7; wherein the colloidal silica abrasive particles have a permanent positive charge of at least 13 mV; and wherein an aminosilane compound is bonded with the outer surface of the colloidal silica abrasive particles. - View Dependent Claims (25, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification