INTEGRATED PASSIVE MODULE, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
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1. An integrated passive module, comprising:
- a ceramic substrate in which at least one first passive component is embedded;
a planar layer disposed on the ceramic substrate; and
a thin film laminate comprising at least one second passive component and disposed on the planar layer, wherein the thin film laminate is electrically connected to the first passive component.
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Abstract
An integrated passive module comprises a ceramic substrate, a planar layer and a thin film laminate. At least one first passive component is embedded in ceramic substrate. The planar layer is disposed on the ceramic substrate. The thin film laminate comprises at least one second passive component and disposed on the planar layer. The thin film laminate is electrically connected to the first passive component. This disclosure also discloses a semiconductor device comprising an integrated passive module and at least one active component. The at least one active component is electrically connected to the first passive component and the second passive component.
19 Citations
19 Claims
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1. An integrated passive module, comprising:
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a ceramic substrate in which at least one first passive component is embedded; a planar layer disposed on the ceramic substrate; and a thin film laminate comprising at least one second passive component and disposed on the planar layer, wherein the thin film laminate is electrically connected to the first passive component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A semiconductor device, comprising:
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an integrated passive module comprising; a ceramic substrate in which at least one first passive component is embedded; a planar layer disposed on the ceramic substrate; and a thin film laminate disposed on the planar layer and electrically connected to the first passive component, wherein the thin film laminate comprises at least one second passive component; and at least one active component electrically connected to the first passive component and the second passive component. - View Dependent Claims (11, 12)
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13. A method for manufacturing semiconductor device, comprising:
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providing a ceramic substrate in which at least one first passive component is embedded; grinding a surface of the ceramic substrate; forming a planar layer on the surface of the ceramic substrate; and forming a thin film laminate on one side of the planar layer facing away from the ceramic substrate, wherein the thin film laminate comprises at least one second passive component, and the thin film laminate is electrically connected to the first passive component. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification