OPTICAL FILTER AND SENSOR SYSTEM
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Accused Products
Abstract
An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
6 Citations
51 Claims
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1-20. -20. (canceled)
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21. An optical filter, comprising:
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a filter stack comprising; a plurality of hydrogenated silicon layers, wherein the plurality of hydrogenated silicon layers have a refractive index of greater than 3 over a wavelength range of 800 nm to 1100 nm; and a plurality of lower-refractive-index layers, wherein the plurality of lower-refractive-index layers have a refractive index of less than 3 over the wavelength range of 800 nm to 1100 nm, and wherein the plurality of lower-refractive-index layers are stacked in alternation with the plurality of hydrogenated silicon layers; and wherein the optical filter has a passband at least partially overlapping with the wavelength range of 800 nm to 1100 nm, wherein the passband has a center wavelength that shifts by less than 20 nm in magnitude with a change in an incidence angle between 0°
to 30°
. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. A sensor system, comprising:
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an optical filter, having a passband including an emission wavelength and at least partially overlapping with a wavelength range of 800 nm to 1100 nm, being disposed to receive emitted light and transmit the emitted light, wherein the emitted light is emitted, from a light source, at the emission wavelength in the wavelength range of 800 nm to 1100 nm, and wherein the optical filter includes a filter stack including; a plurality of hydrogenated silicon layers, wherein the plurality of hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm; and a plurality of lower-refractive-index layers, wherein the plurality of lower-refractive-index layers each have a refractive index of less than 3 over the wavelength range of 800 nm to 1100 nm, and wherein the plurality of lower-refractive-index layers are stacked in alternation with the plurality of hydrogenated silicon layers, wherein the passband has a center wavelength that shifts by less than 20 nm in magnitude with a change in an incidence angle between 0°
to 30°
. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47)
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48. A system, comprising:
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an optical filter, having a passband including an emission wavelength and at least partially overlapping with a wavelength range of 800 nm to 1100 nm; wherein the optical filter includes a filter stack including; a plurality of hydrogenated silicon layers, wherein the plurality of hydrogenated silicon layers have a refractive index of greater than 3.5 over a wavelength range of 800 nm to 1100 nm; and a plurality of lower-refractive-index layers, wherein the plurality of lower-refractive-index layers have a refractive index of less than 3 over the wavelength range of 800 nm to 1100 nm, and wherein the passband has a center wavelength that shifts by less than 20 nm in magnitude with a change in an incidence angle between 0°
to 30°
. - View Dependent Claims (50, 51)
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49. (canceled)
Specification