METHOD OF PRODUCING LAYER STRUCTURE, AND METHOD OF FORMING PATTERNS
First Claim
1. A method of producing a layer structure, the method comprisingcoating a first composition on a substrate that has a pattern thereon;
- curing the coated first composition to form a first organic layer;
applying a liquid material to the first organic layer to remove a part of the first organic layer; and
coating a second composition on remaining parts of the first organic layer; and
curing the coated second composition on the remaining parts of the first organic layer to form a second organic layer;
wherein the first composition and the second composition each independently include;
a solvent, anda polymer including a structural unit represented by Chemical Formula 1,
*
A1-B1
*[Chemical Formula 1]wherein, in Chemical Formula 1,A1 is a divalent cyclic group including at least one of a substituted or unsubstituted benzene ring,B1 is a divalent organic group, and* is a linking point.
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Abstract
A method of producing a layer structure and a method of forming a pattern, the method of producing a layer structure including coating a first composition on a substrate that has a pattern thereon; curing the coated first composition to form a first organic layer; applying a liquid material to the first organic layer to remove a part of the first organic layer; and coating a second composition on remaining parts of the first organic layer; and curing the coated second composition on the remaining parts of the first organic layer to form a second organic layer: wherein the first composition and the second composition each independently include a solvent, and a polymer including a structural unit represented by Chemical Formula 1,
*A1-B1*. [Chemical Formula 1]
7 Citations
20 Claims
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1. A method of producing a layer structure, the method comprising
coating a first composition on a substrate that has a pattern thereon; -
curing the coated first composition to form a first organic layer; applying a liquid material to the first organic layer to remove a part of the first organic layer; and coating a second composition on remaining parts of the first organic layer; and curing the coated second composition on the remaining parts of the first organic layer to form a second organic layer; wherein the first composition and the second composition each independently include; a solvent, and a polymer including a structural unit represented by Chemical Formula 1,
*
A1-B1
*[Chemical Formula 1]wherein, in Chemical Formula 1, A1 is a divalent cyclic group including at least one of a substituted or unsubstituted benzene ring, B1 is a divalent organic group, and * is a linking point. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification