SCREEN PRINTING ELECTRICAL CONTACTS TO NANOSTRUCTURED AREAS

• US 20170278988A1
• Filed: 06/14/2017
• Published: 09/28/2017
• Est. Priority Date: 02/14/2012
• Status: Active Grant

• Current Assignee: Advanced Silicon Group Technologies, LLC
• Original Assignee: Advanced Silicon Group, Inc.
• Inventors: Jura, Michael, Black, Marcie R., Miller, Jeffrey B., Yim, Joanne, Forziati, Joanne, Murphy, Brian P., Chleboski, Richard
• Granted Patent: US 10,269,995 B2
• Time in Patent Office: Days
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: H01L 29/0673 oriented parallel to a substrate
• CPC Class Codes: H01L 31/02167 for solar cells
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/022433 Particular geometry of the grid contacts
• CPC Class Codes: H01L 31/02363 of the semiconductor body itself, e.g. textured active layers
• CPC Class Codes: H01L 31/0312 including, apart from doping materials or other impurities, only AIVBIV compounds, e.g. SiC
• CPC Class Codes: H01L 31/035227 the quantum structure being quantum wires, or nanorods carbon nanotubes H10K85/211
• CPC Class Codes: H01L 31/03682 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/03762 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/1868 Passivation
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y02E 10/546 Polycrystalline silicon PV cells
• CPC Class Codes: Y02E 10/548 Amorphous silicon PV cells

Abstract

A process is provided for contacting a nanostructured surface. The process may include (a) providing a substrate having a nanostructured material on a surface, (b) passivating the surface on which the nanostructured material is located, (c) screen printing onto the nanostructured surface and (d) firing the screen printing ink at a high temperature. In some embodiments, the nanostructured material compromises silicon. In some embodiments, the nanostructured material includes silicon nanowires. In some embodiments, the nanowires are around 150 nm, 250 nm, or 400 nm in length. In some embodiments, the nanowires have a diameter range between about 30 nm and about 200 nm. In some embodiments, the nanowires are tapered such that the base is larger than the tip. In some embodiments, the nanowires are tapered at an angle of about 1 degree, about 3 degrees, or about 10 degrees. In some embodiments, a high temperature can be approximately 700 C, 750 C, 800 C, or 850 C.

Claims

1. A silicon nanostructured device comprising:

a non-nanostructured substrate;

a nanostructured area disposed on and contacting a surface of the substrate;

a passivating layer coating the nanostructured area, the passivating layer comprising one of aluminum oxide, silicon dioxide, or silicon nitride;

one or more first contacts comprising a comb-like pattern of metal directly contacting the nanostructured area;

a p-n junction below the nanostructured area; and

a second metal contact in electrical contact with the substrate.

2. The silicon nanostructured device of claim 1, wherein the device is configured to be suitable for use as a solar cell.

3. The silicon nanostructured device of claim 1, wherein the passivating layer coating the nanostructured area comprises silicon nitride.

4. The silicon nanostructured device of claim 1, wherein lengths of nanostructures in the nanostructured area are between about 150 nm and about 400 nm.

5. The silicon nanostructured device of claim 4, wherein the nanostructures in the nanostructured area have cross-sectional diameters between about 30 nm and about 200 nm.

6. The silicon nanostructured device of claim 1, wherein one third to one half of a volume of the nanostructured area is silicon.

7. The silicon nanostructured device of claim 1, wherein nanostructures in the nanostructured areas are tapered such that bases of the nanostructures on average have larger diameters than tips of the nanostructures.

8. The silicon nanostructured device of claim 1, wherein the non-nanostructured substrate consists of polycrystalline silicon.

9. The silicon nanostructured device of claim 1, wherein the one or more first contacts comprise silver.

10. The silicon nanostructured device of claim 9, wherein the second metal contact comprises aluminum.

11. A silicon nanostructured device comprising:

a non-nanostructured substrate;

a nanostructured area disposed on and contacting a surface of the substrate;

a passivating layer coating the nanostructured area, the passivating layer comprising one of aluminum oxide, silicon dioxide, or silicon nitride;

one or more first contacts comprising a comb-like pattern of metal directly contacting the nanostructured area; and

one or more low resistance second contacts in electrical contact with the substrate.

12. :

The silicon nanostructured device of claim 11, wherein the low resistance of the one or more low resistance contacts is achieved by firing the device at high temperature.

13. The silicon nanostructured device of claim 12, wherein the high temperature is in a range of about 700°

C. to about 900°

C.

14. The silicon nanostructured device of claim 13, wherein the high temperature is in a range of about 775°

C. to about 825°

C.

15. The silicon nanostructured device of claim 12, wherein the device is heat dried before firing at high temperature.

16. The silicon nanostructured device of claim 15, wherein the device is heat dried at a temperature in a range of about 100°

C. to about 200°

C. before firing at high temperature.

17. The silicon nanostructured device of claim 11, wherein the non-nanostructured substrate comprises n-type silicon.

18. The silicon nanostructured device of claim 11, wherein the non-nanostructured substrate comprises silicon having a resistivity of around 1 ohm-cm.

19. The silicon nanostructured device of claim 18, wherein the non-nanostructured substrate comprises n-type silicon.

20. The silicon nanostructured device of claim 19, wherein the non-nanostructured substrate has a (100) crystallographic orientation.