SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
First Claim
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1. A method for fabricating semiconductor device, comprising:
- providing a substrate having a gate structure thereon;
forming a silicon layer on the substrate to cover the gate structure entirely;
planarizing the silicon layer; and
performing a replacement metal gate (RMG) process to transform the gate structure into a metal gate.
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Abstract
A method for fabricating semiconductor device includes the steps of: providing a substrate having a gate structure thereon; forming a silicon layer on the substrate to cover the gate structure entirely; planarizing the silicon layer; and performing a replacement metal gate (RMG) process to transform the gate structure into a metal gate.
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8 Claims
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1. A method for fabricating semiconductor device, comprising:
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providing a substrate having a gate structure thereon; forming a silicon layer on the substrate to cover the gate structure entirely; planarizing the silicon layer; and performing a replacement metal gate (RMG) process to transform the gate structure into a metal gate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification