DEVICE STRUCTURE HAVING INTER-DIGITATED BACK TO BACK MOSFETS
First Claim
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1. A bi-directional switch device, comprising:
- a semiconducting substrate;
two inter-digitated back-to-back vertical metal oxide semiconductor field effect transistors (MOSFETs) formed on the substrate, with their drains connected together, but otherwise isolated from each other anda termination structure formed between the two MOSFET having one or more trenches, each in a size different from that of active gate trenches in active cells in the two MOSFETs.
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Abstract
A bi-directional switch device includes two inter-digitated back-to-back vertical metal oxide semiconductor field effect transistors (MOSFETs) formed on a substrate with their drains connected together, but otherwise isolated from each other.
18 Citations
22 Claims
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1. A bi-directional switch device, comprising:
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a semiconducting substrate; two inter-digitated back-to-back vertical metal oxide semiconductor field effect transistors (MOSFETs) formed on the substrate, with their drains connected together, but otherwise isolated from each other and a termination structure formed between the two MOSFET having one or more trenches, each in a size different from that of active gate trenches in active cells in the two MOSFETs. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A bi-directional switch device, comprising:
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a semiconducting substrate; a first vertical metal oxide semiconductor field effect transistor (MOSFET) formed on the substrate, the first vertical metal oxide semiconductor field effect transistor having a first source region, a first gate region disposed on a first top portion of the substrate and a first drain disposed on a first bottom portion of the substrate, a first source metal electrically connected to the first source region; a second vertical MOSFET formed on the substrate, the second vertical metal oxide semiconductor field effect transistor comprises a second source region, a second gate region disposed on a second top portion of the substrate and a second drain disposed on a second bottom portion of the substrate, a second source metal electrically connected to the second source region; and an isolation structure comprising at least a trench between the first and second MOSFETs, wherein each of the at least a trench is in a size different from that of active gate trenches in active cells in the first and second MOSFETs, wherein the first and second drains are electrically connected together, the first source and the first gate are electrically isolated from the second source and the second gate respectively thus forming two back-to-back MOSFET. - View Dependent Claims (21, 22)
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Specification