HYDROGEN SENSOR

• US 20180252658A1
• Filed: 09/16/2016
• Published: 09/06/2018
• Est. Priority Date: 09/16/2015
• Status: Active Grant

• Current Assignee: KOA Corporation
• Original Assignee: KOA Corporation
• Inventors: UEDA, Toshitsugu, OIGAWA, Hiroshi
• Granted Patent: US 10,690,606 B2
• Time in Patent Office: Days
• CPC Class Codes: G01N 25/22 on combustion or catalytic oxidation, e.g. of components of gas mixtures
• CPC Class Codes: G01N 33/005 for H2

Abstract

In order to provide a hydrogen sensor for measuring a hydrogen concentration with high sensitivity and excellent mass-productivity, the hydrogen sensor includes: at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate; a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and a hydrogen non-reactive layer formed in the second quartz vibrator, wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increasing by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.

Claims

1. A hydrogen sensor comprising:

at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate;

a hydrogen reaction catalytic layer including a platinum film of platinum black formed on both sides of the first quartz vibrator; and

a hydrogen non-reactive layer formed in the second quartz vibrator,

wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increased by heat of combustion caused by oxidization of hydrogen by the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.

3. The hydrogen sensor according to claim 1, wherein an average thickness of the hydrogen reaction catalytic layer is set to 30 nm or larger and 600 nm or smaller.

4. The hydrogen sensor according to claim 1, wherein the hydrogen reaction catalytic layer is formed by plating the platinum film.

5. The hydrogen sensor according to claim 1, wherein the hydrogen reaction catalytic layer is formed by coating platinum black powder.

2. A hydrogen sensor comprising:

at least a first quartz vibrator and a second quartz vibrator formed in a quartz plate;

a hydrogen reaction catalytic layer that is formed on both sides of the first quartz vibrator and includes a platinum film having a plurality of protrusions on its surface, the protrusions having a particulate shape in surface observation or having a dendritic shape, a needle-like shape, or a columnar shape in cross-sectional observation; and

a hydrogen non-reactive layer formed in the second quartz vibrator,

wherein a hydrogen concentration is measured by measuring a temperature of the first quartz vibrator increased by heat of combustion caused by oxidization of hydrogen in the hydrogen reaction catalytic layer as a change of a natural frequency of the first quartz vibrator with respect to a natural frequency of the second quartz vibrator.