STACKED NANOSHEET FIELD-EFFECT TRANSISTOR WITH AIRGAP SPACERS
First Claim
1. A structure for a field-effect transistor, the structure comprising:
- a fin including a first nanosheet channel layer and a second nanosheet channel layer arranged in a vertical stack;
a gate structure including a section located vertically in a space between the first nanosheet channel layer and the second nanosheet channel layer;
a source/drain region connected with a portion of the first nanosheet channel layer and a portion of the second nanosheet channel layer; and
an air gap spacer surrounded by the portion of the first nanosheet channel layer, the portion of the second nanosheet channel layer, the section of the gate structure, and the source/drain region.
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Accused Products
Abstract
Structures for a nanosheet field-effect transistor and methods for forming a structure for a nanosheet field-effect transistor. A fin is formed that includes a first nanosheet channel layer and a second nanosheet channel layer arranged in a vertical stack. A cavity is formed between a portion of the first nanosheet channel layer and a portion of the second nanosheet channel layer. An epitaxially-grown source/drain region is connected with the portion of the first nanosheet channel layer and the portion of the second nanosheet channel layer. A gate structure is formed that includes a section located in a space between the first nanosheet channel layer and the second nanosheet channel layer. The cavity is surrounded by the first nanosheet channel layer, the second nanosheet channel layer, the section of the gate structure, and the source/drain region to define an air gap spacer.
50 Citations
20 Claims
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1. A structure for a field-effect transistor, the structure comprising:
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a fin including a first nanosheet channel layer and a second nanosheet channel layer arranged in a vertical stack; a gate structure including a section located vertically in a space between the first nanosheet channel layer and the second nanosheet channel layer; a source/drain region connected with a portion of the first nanosheet channel layer and a portion of the second nanosheet channel layer; and an air gap spacer surrounded by the portion of the first nanosheet channel layer, the portion of the second nanosheet channel layer, the section of the gate structure, and the source/drain region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for forming a field-effect transistor, the method comprising:
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forming a first fin that includes a first nanosheet channel layer and a second nanosheet channel layer arranged in a vertical stack; forming a cavity between a portion of the first nanosheet channel layer and a portion of the second nanosheet channel layer; epitaxially growing a source/drain region connected with the portion of the first nanosheet channel layer and the portion of the second nanosheet channel layer; and forming a first gate structure including a section located in a space between the first nanosheet channel layer and the second nanosheet channel layer, wherein the cavity is surrounded by the portion of the first nanosheet channel layer, the portion of the second nanosheet channel layer, the section of the first gate structure, and the source/drain region to define an air gap spacer. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification