Micro-electromechanical inductive switch

• US 6,831,542 B2
• Filed: 02/26/2003
• Issued: 12/14/2004
• Est. Priority Date: 02/26/2003
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Florkey, John E., Volant, Richard P., Groves, Robert A.
• Primary Examiner(s): Barrera, Ramon M.
• Application Number:
  US10/248,876
• Publication Number:
  US 20040164825A1
• Time in Patent Office: 657 Days
• Field of Search: 336/115-129, 336/232
• US Class Current: 336/115
• CPC Class Codes: H01F 2007/068 using printed circuit coils
• CPC Class Codes: H01F 7/066 Electromagnets with movable winding
• CPC Class Codes: H01F 7/14 Pivoting armatures H01F7/17 takes precedence
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H03K 17/965 Switches controlled by moving an element forming part of the switch

Abstract

A micro-electro mechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a movable platform and a second plurality of coils on a stationary platform or substrate, the coils on the movable platform being above or below those in the stationary substrate. Coupling and decoupling occurs by rotating or by laterally displacing the coils of the movable platform with respect to the coils on the stationary substrate. Diverse arrangements of coils respectively on the movable and stationary substrates allow for a multi-pole and multi-position switching configurations. The MEM switches described eliminate problems of stiction, arcing and welding of the switch contacts. The MEMS switches of the invention can be fabricated using standard CMOS techniques.

Claims

1. A semiconductor micro-electromechanical (MEM) switch comprising:

at least one movable inductor; and

at least one inductor on a stationary substrate, wherein the relative movement of said at least one movable inductor with respect to said at least one stationary inductor electrically couples and decouples said at least one movable inductor to and from said at least one stationary inductor.

2. The MEM switch as recited in claim 1 further comprising driving means coupled to said at least one movable inductor.

3. The MEM switch as recited in claim 2, wherein said at least one movable inductor and said at least one stationary inductor are respectively placed on a first and second planes or substrates.

4. The MEM switch as recited in claim 3, wherein said first plane is a movable platform above or below said second plane.

5. The MEM switch as recited in claim 4, wherein said driving means are external to said movable platform, said driving means providing a rotational movement.

6. The MEM switch as recited in claim 4, further comprising a second and third inductors on said movable platform interconnected to each other at respective ends thereof.

7. A MEM switch on a stationary substrate comprising:

an arrangement of inductors on said stationary substrate grouped in close proximity of each other, and at least one inductor separate from said arrangement of inductors; and

two inductors interconnected to each other on a rotating platform, wherein one of said inductors on said rotating platform alternatively couples and decouples one of said inductors in said arrangement of inductors by the rotation of rotating platform, while the second inductor on said rotating platform couples and decouples said at least one inductor separate from said arrangement of inductors on said stationary substrate.

8. The MEM switch as recited in claim 7 wherein said rotating platform is attached to a pivot pin at one end thereof.

9. The MEM switch as recited in claim 7 wherein said rotating platform is attached to a fulcrum, said fulcrum rotating about said pivot pin at one end thereof.

10. A MEM switch comprising:

a first and second arrangement of inductors on a stationary substrate; and

two pairs of inductors, said two pairs respectively placed on two movable platforms, said movable platforms being coupled to each other at respective ends of a fulcrum, said fulcrum being attached to a pivot pin allowing a rotating movement of said movable platforms, wherein said rotational movement couples and decouples respective pairs of said inductors on said movable platforms to and from respective pairs of said first and second arrangement of inductors on said stationary substrate.

11. A MEM switch comprising:

an arrangement of inductors on a stationary substrate; and

a movable platform rotating about a pivot pin, said movable platform having two inductors thereon, said movable platform allowing each of said inductors thereon alternatively couple and decouple inductors of said arrangement on said stationary substrate.

12. A semiconductor multi-pole inductive MEM switch comprising:

a plurality of inductors on a stationary substrate;

at least one inductor on a movable platform, said moving platform being coupled to driving means providing a lateral displacement of said movable platform with respect to said stationary substrate, said movable platform coupling and decoupling said at least one inductor to said plurality of inductors on said stationary substrate.

13. The semiconductor multi-pole inductive MEM switch as recited in claim 12, wherein said inductors form either a single closed loop or a spiral of consisting of multiple loops.

14. A semiconductor inductive MEM switch comprising:

at least one inductor on a stationary platform;

two pairs of inductors, each of said two pair being respectively placed on one rotating platform, each of said rotating platforms having an end thereof attached to a pivot pin, wherein the rotational movement of said two platforms alternatively couples and decoupled said pairs of inductors to and from said at least one inductor on a stationary platform.

15. A semiconductor inductive MEM switch comprising:

an arrangement of inductors on a stationary substrate;

a plurality of interconnected inductors on a rotating platform, wherein said rotating platform couples and decouples said plurality of interconnected inductors to and from said arrangement of inductors on said stationary substrate.

16. The semiconductor inductive MEM switch as recited in claim 15, wherein said rotating platform is attached to a pivot pin on or about the center of gravity of said rotating platform, said pivot pin being anchored on said stationary substrate.

17. A semiconductor MEM switch-switch combination comprising:

a plurality of inductors on a stationary substrate;

a rotating platform having at least one inductor thereon, said rotating platform rotating around a pivot pin attached at an end thereof, said pivot pin being anchored on said stationary substrate, said rotating platform alternatively coupling and decoupling said plurality of inductors to and from said inductor on said stationary substrate.