Breath-mode ring resonator structure, and method of designing, operating and using same

• US 7,323,952 B2
• Filed: 09/02/2005
• Issued: 01/29/2008
• Est. Priority Date: 09/02/2005
• Status: Expired due to Fees

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Partridge, Aaron, Lutz, Markus, Pan, Zhiyu
• Primary Examiner(s): Summons; Barbara
• Application Number:
  US11/219,569
• Publication Number:
  US 20070052498A1
• Time in Patent Office: 879 Days
• Field of Search: 333/186
• US Class Current: 333/186
• CPC Class Codes: H03H 2009/02354 applied along the periphery, e.g. at nodal points of the ring
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 2009/02503 Breath-like, e.g. Lam? mode, wine-glass mode
• CPC Class Codes: H03H 2009/02527 Combined
• CPC Class Codes: H03H 3/0077 by tuning of resonance frequency
• CPC Class Codes: H03H 9/0023 Balance-unbalance or balance-balance networks
• CPC Class Codes: H03H 9/02244 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/02259 Driving or detection means
• CPC Class Codes: H03H 9/02338 Suspension means
• CPC Class Codes: H03H 9/2431 Ring resonators

Abstract

There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to one or more microelectromechanical ring resonator structures having a circular or substantially circular outer surface and a circular or substantially circular inner surface. The microelectromechanical ring resonator(s) include an anchor support element having an impedance matching structure coupled to at least one substrate anchor. The impedance matching structure may be a beam, having a predetermined length, which couples the ring resonator(s) to substrate anchor. In one embodiment, the impedance matching structure operates in a bulk-elongation mode. In another embodiment, the impedance matching structure operates in a flexure mode. In operation, when induced, the microelectromechanical ring resonator structure oscillates in an elongating/compressing or breathing mode (or in a primarily or substantially elongating or breathing mode). In this regard, the ring resonator structure exhibits an elongating/compressing-like or breathing-like motion.

Claims

1. A MEMS ring resonator, comprising:

a MEMS ring resonator structure including;

an outer surface, wherein the outer surface includes a circular or substantially circular shape having an outer radius of curvature; and

an inner surface, wherein the inner surface includes a circular or substantially circular shape having an inner radius of curvature;

an anchor support element including an impedance matching structure; and

a coupling beam, disposed between the impedance matching structure and the outer surface of the MEMS ring resonator structure;

wherein;

in operation, the MEMS ring resonator structure oscillates in an elongating/compressing mode; and

the impedance matching structure, in operation, resonates in a flexure mode.

2. The MEMS ring resonator of claim 1 wherein the impedance matching structure is a beam that extends from the outer surface.

3. The MEMS ring resonator of claim 2 wherein the beam, in operation, resonates in a bulk-elongation mode.

4. The MEMS ring resonator of claim 3 wherein the MEMS ring resonator structure includes a length and wherein the beam includes a length that is or is about one fourth of the length of the MEMS ring resonator structure.

5. The MEMS ring resonator of claim 3 further including at least one substrate anchor connected to a distal end of the impedance matching structure to secure the impedance matching structure to the substrate.

6. The MEMS ring resonator of claim 1 wherein the impedance matching structure flexes in-phase with the oscillation of the MEMS ring resonator structure.

7. The MEMS ring resonator of claim 1 further including at least one substrate anchor connected to a distal end of the impedance matching structure to secure the impedance matching structure to the substrate.

8. A MEMS ring resonator, comprising:

a MEMS ring resonator structure including;

an outer surface, wherein the outer surface includes a circular or substantially circular shape having a radius of curvature; and

an inner surface, wherein the inner surface includes a circular or substantially circular shape having a radius of curvature;

an anchor support element including an impedance matching structure, wherein the impedance matching structure is a beam that extends from the outer surface;

at least one sense electrode;

at least one drive electrode, wherein the sense and drive electrodes are juxtaposed one of the surfaces of the MEMS ring resonator structure; and

sense circuitry, coupled to the sense electrodes, to provide an output signal;

wherein, in operation, the MEMS ring resonator structure oscillates in an elongating/compressing mode.

9. The MEMS ring resonator of claim 8 wherein the at least one sense electrode provides one or more signals to the sense circuitry which, in response, provides a differential output signal.

10. The MEMS ring resonator of claim 8 wherein the at least one sense electrode provides one or more signals to the sense circuitry which, in response, provides a single ended output signal.

11. The MEMS ring resonator of claim 8 wherein the beam, in operation, resonates in a bulk-elongation mode.

12. The MEMS ring resonator of claim 11 wherein the MEMS ring resonator structure includes a length and wherein the beam includes a length that is or is about one fourth of the length of the MEMS ring resonator structure.

13. The MEMS ring resonator of claim 11 further including at least one substrate anchor connected to a distal end of the impedance matching structure to secure the impedance matching structure to the substrate.

14. A MEMS ring resonator, comprising:

a MEMS ring resonator structure including;

an outer surface, wherein the outer surface includes a circular or substantially circular shape having a radius of curvature; and

an inner surface, wherein the inner surface includes a circular or substantially circular shape having a radius of curvature;

an anchor support element including an impedance matching structure;

a coupling beam, disposed between the impedance matching structure and the outer surface of the MEMS ring resonator structure, wherein the impedance matching structure, in operation, resonates in a flexure mode;

at least one sense electrode;

at least one drive electrode, wherein the sense and drive electrodes are juxtaposed one of the surfaces of the MEMS ring resonator structure; and

sense circuitry, coupled to the sense electrodes, to provide an output signal;

wherein, in operation, the MEMS ring resonator structure oscillates in an elongating/compressing mode.

15. The MEMS ring resonator of claim 14 wherein the impedance matching structure flexes in-phase with the oscillation of the MEMS ring resonator structure.

16. The MEMS ring resonator of claim 14 further including at least one substrate anchor connected to a distal end of the impedance matching structure to secure the impedance matching structure to the substrate.

17. The MEMS ring resonator of claim 14 further including a plurality of substrate anchors wherein each distal end of the impedance matching structure is attached to a substrate anchor to secure the impedance matching structure to the substrate.

18. The MEMS ring resonator of claim 14 wherein the impedance matching structure includes a beam having a length that is or is about one fourth of the length of the MEMS ring resonator structure and wherein, in operation, the beam flexes in-phase with the oscillation of the MEMS ring resonator structure.