Multilayer coatings for EUV mask substrates

• US 7,326,502 B2
• Filed: 09/18/2003
• Issued: 02/05/2008
• Est. Priority Date: 09/18/2003
• Status: Expired due to Fees

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Silverman, Peter J.
• Primary Examiner(s): ROSASCO, STEPHEN D
• Application Number:
  US10/665,416
• Publication Number:
  US 20050064298A1
• Time in Patent Office: 1,601 Days
• Field of Search: 430/5, 428/428, 428/430, 378/35
• US Class Current: 430/5
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3636 one layer at least containing silicon, hydrogenated silicon or a silicide
• CPC Class Codes: C03C 17/3649 made of metals other than silver
• CPC Class Codes: C03C 17/3665 specially adapted for use as photomask
• CPC Class Codes: C03C 2217/734 comprising an alternation of high and low refractive indexes
• CPC Class Codes: G03F 1/24 Reflection masks; Preparation thereof
• CPC Class Codes: G21K 1/062 Devices having a multilayer structure
• CPC Class Codes: G21K 1/10 Scattering devices; Absorbing devices; Ionising radiation filters

Abstract

Techniques, methods, and structures disclosed in relation to extreme ultraviolet (EUV) lithography in semiconductor processing. In one exemplary implementation, a method may comprise using ion beam deposition to deposit a first multilayer stack of thin films on a substrate to planarize and smooth surface defects on the substrate. The method includes using atomic layer deposition to deposit a second multilayer stack of thin films on the first multilayer stack of thin films. The second multilayer stack of thin films may comprise an extreme ultraviolet reflective multilayer stack. The second multilayer stack of thin films may comprise fewer surface defects than the first multilayer stack of thin films. The method may further comprise processing an extreme ultraviolet mask blank to form an extreme ultraviolet reflective mask.

Claims

1. An apparatus, the apparatus comprising:

a substrate;

a first multilayer of films on top of the substrate to form a flat top surface by a first deposition process; and

a second multilayer of films on top of and in contact with the first multilayer of films, the second multilayer of films effectuating a Bragg reflector to reflect extreme ultraviolet radiation, the second multilayer of films being deposited with a second deposition process different from the first deposition process, wherein the second deposition process comprises an atomic layer deposition process.

2. The apparatus of claim 1, wherein the first and second multilayers of films comprise alternating layers of films, wherein the alternating layers of films comprise a first film and a second film with different optical properties.

3. The apparatus of claim 2, wherein the first and second multilayers comprise one of Molybdenum and Silicon films, Molybdenum and Beryllium films, and Molybdenum and Silicon compound films, wherein the Silicon compound comprises one of Silicon Nitride and Silicon Dioxide.

4. The apparatus of claim 2, wherein the substrate comprises a low thermal expansion substrate.

5. The apparatus of claim 2, wherein the first deposition process is an ion beam deposition process.

6. The apparatus of claim 1, wherein the first multilayer of films planarizes and smoothes surface defects of 50 nm or less on the substrate.

7. The apparatus of claim 6, wherein the first multilayer of films comprises a range of 20 to 40 alternating layers of films.

8. The apparatus of claim 2, wherein the second multilayer of films comprises a range of 40 to 60 alternating layers of films.

9. The apparatus of claim 1, wherein the apparatus is an extreme ultraviolet mask blank.

10. The apparatus of claim 9, wherein the extreme ultraviolet mask blank is processed to form an extreme ultraviolet mask.

11. An apparatus, the apparatus comprising:

a low thermal expansion substrate;

a first multilayer of thin films on top of the low thermal expansion substrate, the first multilayer of thin films being deposited with ion beam deposition; and

a second multilayer of thin films on top of and in contact with the first multilayer of thin films, the second multilayer of thin films comprising a multilayer reflective to extreme ultraviolet radiation, the second multilayer of thin films being deposited with atomic layer deposition.

12. The apparatus of claim 11, wherein the first multilayer of thin films comprises 20 to 40 alternating layers of thin films and the second multilayer of thin films comprises 40 to 60 alternating layers of thin films, wherein the alternating layers of thin films comprise one of Molybdenum and Silicon thin films, Molybdenum and Beryllium thin films, and Molybdenum and Silicon compound thin films, wherein the Silicon compound comprises one of Silicon Nitride and Silicon Dioxide.

13. The apparatus of claim 12, wherein the apparatus further comprises:

a patterned buffer layer on top of the second multilayer of thin films, the patterned buffer layer comprising an oxide layer; and

a patterned absorber layer on top of the patterned buffer layer, the patterned absorber layer comprising a metal.