Apparatus for depth-selective Raman spectroscopy

  • US 7,652,763 B2
  • Filed: 11/25/2005
  • Issued: 01/26/2010
  • Est. Priority Date: 12/09/2004
  • Status: Active Grant
First Claim
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1. A method of measuring sub-surface Raman scattering through a diffusely scattering sample, comprising:

  • (a) supplying incident radiation at one or more entry regions on a surface of the sample;

    (b) collecting light scattered within the sample, from one or more collection region on the surface, at a plurality of spacings from the one or more entry regions;

    (c) detecting, in the collected light, for each spacing, one or more Raman features spectrally related to the incident radiation; and

    (d) deriving, from changes in intensities of the one or more Raman features between the different spacings, one or more characteristics of a sub-surface region of the sample.

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