Image sensor and method of manufacturing the same
First Claim
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1. A method of manufacturing an image sensor, comprising:
- forming an inorganic layer on a semiconductor substrate including unit pixels;
selectively forming lens seed patterns comprising an organic material on the inorganic layer; and
forming microlenses on the lens seed patterns,where the forming of the lens seed pattern comprises;
forming gap patterns on the inorganic layer;
forming lens seed layer on the inorganic layer and the gap patterns using a coating process; and
removing the gap patterns and the lens seed layer on the gap patterns to form the lens seed patterns spaced apart from each other.
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Abstract
Provided is an image sensor and method of manufacturing the same. The image sensor can include a semiconductor substrate, a metal interconnection layer, an inorganic layer, lens seed patterns, and microlenses. The semiconductor substrate can include unit pixels. The metal interconnection layer can be disposed on the semiconductor substrate to provide signal and poser connections to the unit pixels. The inorganic layer can be disposed on the metal interconnection layer. The lens seed patterns are selectively disposed on the inorganic layer and are formed of an organic material. The microlenses are formed on the lens seed patterns.
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9 Claims
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1. A method of manufacturing an image sensor, comprising:
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forming an inorganic layer on a semiconductor substrate including unit pixels; selectively forming lens seed patterns comprising an organic material on the inorganic layer; and forming microlenses on the lens seed patterns, where the forming of the lens seed pattern comprises; forming gap patterns on the inorganic layer; forming lens seed layer on the inorganic layer and the gap patterns using a coating process; and removing the gap patterns and the lens seed layer on the gap patterns to form the lens seed patterns spaced apart from each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification