Method for low temperature bonding and bonded structure
DCFirst Claim
1. A bonding method, comprising:
- bonding first and second materials;
removing a substantial portion of said first material to leave a remaining portion;
forming a first bonding surface on said remaining portion;
forming a second bonding surface on a third material, at least one of said first and second surfaces comprising an insulating material;
enhancing activation of one of said first and second bonding surfaces;
terminating one of said first and second bonding surfaces with species allowing formation of chemical bonds;
bringing together said first and second bonding surfaces; and
forming a chemical bond between said remaining portion and said third material.
3 Assignments
Litigations
2 Petitions
Accused Products
Abstract
A method for bonding at low or room temperature includes steps of surface cleaning and activation by cleaning or etching. One etching process The method may also include removing by-products of interface polymerization to prevent a reverse polymerization reaction to allow room temperature chemical bonding of materials such as silicon, silicon nitride and SiO2. The surfaces to be bonded are polished to a high degree of smoothness and planarity. VSE may use reactive ion etching or wet etching to slightly etch the surfaces being bonded. The surface roughness and planarity are not degraded and may be enhanced by the VSE process. The etched surfaces may be rinsed in solutions such as ammonium hydroxide or ammonium fluoride to promote the formation of desired bonding species on the surfaces.
32 Citations
112 Claims
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1. A bonding method, comprising:
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bonding first and second materials; removing a substantial portion of said first material to leave a remaining portion; forming a first bonding surface on said remaining portion; forming a second bonding surface on a third material, at least one of said first and second surfaces comprising an insulating material; enhancing activation of one of said first and second bonding surfaces; terminating one of said first and second bonding surfaces with species allowing formation of chemical bonds; bringing together said first and second bonding surfaces; and forming a chemical bond between said remaining portion and said third material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A processing method, comprising:
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bonding a first surface of a first element to a second surface of a second element; removing a substantial portion of said first element to leave a remaining portion; exposing a third surface of said remaining portion to a plasma to at least enhance activation of said third surface; terminating said third surface with species capable of forming a chemical bond after exposure to said plasma; bonding said third surface to a fourth surface of a third element after said terminating; heating said remaining portion and said third element to a temperature no more than about 200°
C.; andobtaining a bond strength of at least 500 mJ/m2 between said remaining portion and said third element. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A bonding method, comprising:
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bonding together a first element and a second element; removing a substantial portion of said first element to leave a remaining portion; forming a silicon oxide material on said remaining portion; enhancing activation of a surface of said silicon oxide material using a plasma RIE process; terminating said surface with species allowing formation of chemical bonds; bringing together said silicon oxide material and a third element, after said enhancing activation and said terminating; and forming a chemical bond with a strength of at least 500 mJ/m2 between said remaining portion and said third element. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A bonded structure, comprising:
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first and second materials having first and second bonding surfaces bonded together; a third bonding surface of said first material having enhanced surface activation; said third bonding surface terminated with species allowing formation of chemical bonds; said third bonding surface bonded to a third material; and a chemical bond formed between said first material and said third material after annealing said first and third materials at a temperature of no more than about 200°
C.;at least one of third bonding surface and said third material comprising an insulating material. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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41. A bonding method, comprising:
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forming a silicon oxide material on a first element; enhancing activation of a surface of said silicon oxide material using a plasma RIE process; terminating said surface with a species capable of forming a chemical bond; and bringing together said silicon oxide material and a second element, after said enhancing and terminating; and forming a chemical bond between said silicon oxide material and said second element at a temperature below about 200°
C. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52)
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53. A processing method, comprising:
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exposing a first surface of a first element to a plasma to at least enhance activation of said first surface; terminating said first surface with a species capable of forming a chemical bond with a bond strength of at least 500 mJ/m2 without heating to a temperature more than about 200°
C.; andbringing together said first surface and a second surface of a second element after said terminating; and obtaining a chemical bond with a bond strength of at least 500 mJ/m2. - View Dependent Claims (54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94)
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95. A bonded structure, comprising:
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a first material having a first bonding surface; a second material having a second bonding surface; said first bonding surface having enhanced surface activation; said first bonding surface terminated with species allowing formation of chemical bonds of a strength of at least 500 mJ/m2 at a temperature of no more than about 200°
C.; anda chemical bond formed between said first material and said second material. - View Dependent Claims (96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112)
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Specification