Metal piperidinate and metal pyridinate precursors for thin film deposition
First Claim
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1. A method of forming a metal containing layer on a substrate, comprising:
- a) providing a reactor and at least one substrate disposed therein;
b) introducing a precursor-containing vapor into the reactor, wherein the precursor-containing vapor comprises a precursor selected from the group consisting of;
tetrapiperidinogermanium;
di(piperidinato)diethylgermanium;
tetrakispyridinatogermanium;
bis(2,6-dimethylpyridinato)diethylgermanium;
dipiperidinotellurium; and
tripiperidinoantimony;
c) maintaining the reactor at a temperature of at least about 100°
C.; and
d) contacting the precursor-containing vapor with at least part of the substrate, and forming a metal containing layer on the substrate through a vapor deposition process.
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Abstract
Methods and compositions for depositing a film on one or more substrates include providing a reactor and at least one substrate disposed in the reactor. At least one lanthanide precursor is provided in vapor form and a lanthanide metal thin film layer is deposited onto the substrate.
31 Citations
12 Claims
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1. A method of forming a metal containing layer on a substrate, comprising:
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a) providing a reactor and at least one substrate disposed therein; b) introducing a precursor-containing vapor into the reactor, wherein the precursor-containing vapor comprises a precursor selected from the group consisting of;
tetrapiperidinogermanium;di(piperidinato)diethylgermanium;
tetrakispyridinatogermanium;
bis(2,6-dimethylpyridinato)diethylgermanium;
dipiperidinotellurium; and
tripiperidinoantimony;c) maintaining the reactor at a temperature of at least about 100°
C.; andd) contacting the precursor-containing vapor with at least part of the substrate, and forming a metal containing layer on the substrate through a vapor deposition process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification