Coating of a polymer layer using low power pulsed plasma in a plasma chamber of a large volume

  • US 8,389,070 B2
  • Filed: 03/18/2005
  • Issued: 03/05/2013
  • Est. Priority Date: 03/18/2004
  • Status: Active Grant
First Claim
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1. A method for depositing a polymeric material onto a substrate, the method comprising introducing a monomeric material in a gaseous state into a plasma deposition chamber in which a plasma zone has a volume of at least 0.5 m3, igniting a glow discharge within said chamber, and applying a voltage as a pulsed field, at a power of from 0.001 to 500 w/m3 for a sufficient period of time to allow a polymeric layer to form on the surface of the substrate.

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