Method for manufacturing a monolithic oscillator with bulk acoustic wave (BAW) resonators
First Claim
Patent Images
1. A method, comprising:
- forming a first oscillator on a substrate, the first oscillator having an output;
forming a resonator on the substrate, the resonator being electrically coupled to the first oscillator;
forming a frequency adjustment layer on the resonator;
measuring an output frequency on the output of the first oscillator; and
adjusting the output frequency of the first oscillator by modifying a thickness of the frequency adjustment layer.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of adjustment on manufacturing of a monolithic oscillator including circuit elements and a BAW resonator, this method including the steps of: a) forming the circuit elements and the resonator and electrically connecting them; b) covering the resonator with a frequency adjustment layer; c) measuring the output frequency of the oscillator; d) modifying the thickness of the frequency adjustment layer to modify the output frequency of the oscillator.
18 Citations
17 Claims
-
1. A method, comprising:
-
forming a first oscillator on a substrate, the first oscillator having an output; forming a resonator on the substrate, the resonator being electrically coupled to the first oscillator; forming a frequency adjustment layer on the resonator; measuring an output frequency on the output of the first oscillator; and adjusting the output frequency of the first oscillator by modifying a thickness of the frequency adjustment layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. A method, comprising:
forming an oscillator having a first input, a second input, and an output on a substrate, the oscillator being configured to generate a first frequency value, the forming including; forming a bulk acoustic wave resonator on the substrate, the resonator having a first electrode coupled to the first input of the oscillator and a second electrode coupled to the second input of the oscillator; forming an adjustment layer on the resonator; forming a test pad on the substrate, the test pad being coupled to the output of the oscillator; measuring an output frequency of the oscillator through the test pad; and reducing a thickness of the adjustment layer until the output frequency is the first frequency value. - View Dependent Claims (14, 15, 16, 17)
Specification