Shielded gate trench MOSFET device and fabrication
First Claim
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1. A semiconductor device, comprising:
- a substrate;
a source that is formed in top portion of the substrate;
an active gate trench in the substrate;
a first top gate electrode and a first bottom source electrode that are within the active gate trench, the first bottom source electrode being connected to the source that is formed in the top portion of the substrate;
a gate runner trench;
a second top gate electrode and a second bottom source electrode that are within the gate runner trench, the second bottom source electrode being connected to the source that is formed in the top portion of the substrate;
wherein;
the second top gate electrode is narrower than the second bottom source electrode.
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Abstract
A semiconductor device includes a substrate, an active gate trench in the substrate, the active gate trench has a first top gate electrode and a first bottom source electrode, and a gate runner trench comprising a second top gate electrode and a second bottom source electrode. The second top gate electrode is narrower than the second bottom source electrode.
13 Citations
14 Claims
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1. A semiconductor device, comprising:
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a substrate; a source that is formed in top portion of the substrate; an active gate trench in the substrate; a first top gate electrode and a first bottom source electrode that are within the active gate trench, the first bottom source electrode being connected to the source that is formed in the top portion of the substrate; a gate runner trench; a second top gate electrode and a second bottom source electrode that are within the gate runner trench, the second bottom source electrode being connected to the source that is formed in the top portion of the substrate;
wherein;the second top gate electrode is narrower than the second bottom source electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification