Apparatuses, device, and methods for cleaning tester interface contact elements and support hardware

  • US 8,801,869 B2
  • Filed: 11/04/2011
  • Issued: 08/12/2014
  • Est. Priority Date: 12/03/2009
  • Status: Active Grant
First Claim
Patent Images

1. A cleaning device for cleaning pin contact elements and support hardware in a semiconductor testing apparatus, the cleaning device comprising:

  • a cleaning layer with a configuration for the pin contact elements, the cleaning layer having a plurality of geometric micro-features that extend above a surface of the cleaning layer with predetermined geometrical and dimensional properties;

    a substrate having a configuration to be introduced into the testing apparatus during the normal testing operating of the testing apparatus, wherein the substrate comprises a surrogate semiconductor wafer or packaged IC device;

    the cleaning layer, secured to the substrate, having predetermined characteristics that clean debris from the pin contact elements and support hardware when the pin contact elements and support hardware contact the cleaning layer so that the pin contact elements and support hardware are cleaned during a normal operation of the testing machine.

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