Capacitive electromechanical transducer apparatus and method for adjusting its sensitivity
First Claim
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1. A capacitive electromechanical transducer apparatus comprising:
- cells each including a first electrode and second electrode which is opposite the first electrode with a cavity therebetween,wherein at least one of the cells includes an additional material compared with another cell of the cells or lacks a material compared with another cell of the cells.
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Abstract
A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided.
A capacitive electromechanical transducer apparatus 100 includes cells 102 that include a first electrode 104 and second electrodes 106, each of which is disposed so as to be opposite the first electrode 104 with a cavity 105 therebetween. In the capacitive electromechanical transducer apparatus 100, at least one of the cells 102 includes a processed unit on which at least either addition of a material or removal of a material is performed as processing.
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11 Claims
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1. A capacitive electromechanical transducer apparatus comprising:
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cells each including a first electrode and second electrode which is opposite the first electrode with a cavity therebetween, wherein at least one of the cells includes an additional material compared with another cell of the cells or lacks a material compared with another cell of the cells. - View Dependent Claims (2, 3, 4, 8)
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5. A method for adjusting a sensitivity of a capacitive electromechanical transducer apparatus, the method comprising:
performing, as processing, at least either addition of a material or removal of a material onto or from at least one of the cells, while leaving at least another cell being not subject to the processing. - View Dependent Claims (6, 7)
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9. A capacitive electromechanical transducer apparatus comprising:
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a first cell, a second cell, and a third cell, each of the first cell, the second cell, and the third cell including a first electrode and a second electrode which is opposite the first electrode with a cavity therebetween, wherein an electrical connection resistance between the first cell and the second cell is higher than an electrical connection resistance between the second cell and the third cell. - View Dependent Claims (10, 11)
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Specification