Capacitors in integrated circuits and methods of fabrication thereof
First Claim
1. A method of making a capacitor array, the method comprising:
- forming a first column comprising a first capacitor element and a second capacitor element coupled in series; and
forming a second column comprising a third capacitor element and a fourth capacitor element coupled in series, wherein the first column is coupled in parallel with the second column, wherein the second capacitor element is disposed between the first capacitor element and the fourth capacitor element within a metallization level, wherein the fourth capacitor element is disposed between the second capacitor element and the third capacitor element within the metallization level, wherein the first capacitor element comprises a first plate and a second plate, wherein the second capacitor element comprises a third plate and a fourth plate, wherein the first plate is coupled to the second plate through a first resistor, and wherein the third plate is coupled to the fourth plate through a second resistor.
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Accused Products
Abstract
In one embodiment, a capacitor includes a first row including a first capacitor element and a second capacitor element coupled in parallel, and a second row including a third capacitor element and a fourth capacitor element coupled in parallel. The first row is coupled in series with the second row. In a metallization level over a workpiece, the second capacitor element is disposed between the first capacitor element and the third capacitor element. In the metallization level, the third capacitor element is disposed between the second capacitor element and the fourth capacitor element. The first, the second, the third, and the fourth capacitor elements are disposed in the metallization level.
15 Citations
24 Claims
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1. A method of making a capacitor array, the method comprising:
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forming a first column comprising a first capacitor element and a second capacitor element coupled in series; and forming a second column comprising a third capacitor element and a fourth capacitor element coupled in series, wherein the first column is coupled in parallel with the second column, wherein the second capacitor element is disposed between the first capacitor element and the fourth capacitor element within a metallization level, wherein the fourth capacitor element is disposed between the second capacitor element and the third capacitor element within the metallization level, wherein the first capacitor element comprises a first plate and a second plate, wherein the second capacitor element comprises a third plate and a fourth plate, wherein the first plate is coupled to the second plate through a first resistor, and wherein the third plate is coupled to the fourth plate through a second resistor. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A capacitor comprising:
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a first conductive line oriented along a first direction disposed over a substrate in a first metal level; a second conductive line oriented along the first direction disposed over the substrate in the first metal level, and capacitively coupled to the first conductive line; a third conductive line oriented along the first direction disposed over the substrate in the first metal level, the second conductive line disposed between the first and the third conductive lines; a first perpendicular conductive line oriented along a second direction disposed in a second metal level over the first metal level, wherein the first conductive line is coupled to the first perpendicular conductive line, wherein the first direction is perpendicular to the second direction; a second perpendicular conductive line oriented along the second direction disposed in the second metal level, wherein the second perpendicular conductive line is coupled to the third conductive line, wherein the first perpendicular conductive line is coupled to a first potential node, wherein the second perpendicular conductive line is coupled to a second potential node that is electrically insulated from the first potential node so that the first potential node can carry a first potential and the second potential node can carry a second potential different than the first potential; and a first resistor and a second resistor, wherein the second conductive line is coupled to the first potential node through the first resistor and to the second potential node through the second resistor. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A capacitor array comprising:
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a first column comprising a first capacitor element and a second capacitor element coupled in series; a second column comprising a third capacitor element and a fourth capacitor element coupled in series, wherein the second column being coupled in parallel with the first column; a first resistor; and a second resistor; wherein the second capacitor element is disposed between the first capacitor element and the fourth capacitor element within a metallization level; wherein the fourth capacitor element is disposed between the second capacitor element and the third capacitor element within the metallization level; wherein the first capacitor element comprises a first plate and a second plate; wherein the second capacitor element comprises a third plate and a fourth plate; wherein the first plate is coupled to the second plate through a first resistor; and wherein the third plate is coupled to the fourth plate through a second resistor. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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Specification