CMP pad dressers having leveled tips and associated methods

  • US 9,724,802 B2
  • Filed: 10/03/2014
  • Issued: 08/08/2017
  • Est. Priority Date: 05/16/2005
  • Status: Active Grant
First Claim
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1. A CMP pad dresser, comprising:

  • a rigid support substrate; and

    a monolayer of a plurality of superabrasive particles coupled to the support substrate, wherein each superabrasive particle in the monolayer extends away from the support substrate to a protrusion distance, wherein a tip of each of the plurality of superabrasive particles aligns along a designated profile with a tip variation of from about 5 microns to about 100 microns, and wherein the difference in protrusion distance between the highest protruding tip and the second highest protruding tip of the monolayer of superabrasive particles is less than or equal to about 50 microns, and the difference in protrusion distance between the highest 1% of the protruding tips of the monolayer of superabrasive particles are within about 80 microns or less.

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